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Products Thermopile Sensors Vacuum Sensors Vaccum Sensor
The vacuum sensor is a miniature Pirani-type sensor based on a heated resistor structure on a thin miromachined membrane.
Features :
  • Range: 1 mbar –10-5mbar
  • Gas selection: N, He, Ar
  • RS 232 interface
  • Calibration mode and zero balancing
  • Power supply 5V, 100 mA
  • KF -small flange connection
  • Simple sensor exchange (TO39housing)

The  vacuum sensor series HVS contains new innovative sensorchips in silicon micro machining technology. We can offer both the sensor in a TO-5 housing and the complete micro Pirani vaccuum sensor with standard RS232 interface and display. The silicon batch technology allows miniaturization and low cost high volume manufacturing. The standard measurement range from 1E-5mbar to 1E-2mbar can be extended to 1E-1mbar on special request

Pirani Application Set

(in preparation)

For a fast and easy evaluation a small application set is offered. The application set needs a power supply of 5 V and 100 mA. It comes with a KF small flange connection and the vacuum sensor in TO-39 housing can be easily exchanged. The application set offers calibration mode and zero balancing and it can be interfaced by RS232.

 Technical Specifications
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